Title : Optimization of a two-step Ni(5% Pt) germanosilicidation process and the redistribution of Pt in Ni(Pt)Si1-xGex germanosilicide

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Affiliation of Author(s):晶体材料研究所

Title of Paper:Optimization of a two-step Ni(5% Pt) germanosilicidation process and the redistribution of Pt in Ni(Pt)Si1-xGex germanosilicide

Journal:Vacuum

First Author:Liu Hong

Indexed by:Applied Research

Document Code:lw-173032

Translation or Not:no

Date of Publication:2015-01-06