Paper Publications
Title of Award : Optimization of a two-step Ni(5% Pt) germanosilicidation process and the redistribution of Pt in Ni(Pt)Si1-xGex germanosilicide
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Institution:晶体材料研究所
Title of Paper:Optimization of a two-step Ni(5% Pt) germanosilicidation process and the redistribution of Pt in Ni(Pt)Si1-xGex germanosilicide
Journal:Vacuum
First Author:刘宏
Document Code:lw-173032
Translation or Not:No
Date of Publication:2015-01
Release Time:2019-04-14