山东大学教师主页刘宏 Effects of carbon pre-germanidation implant into Ge on the thermal stability of NiGe films Home

Title of Award : Effects of carbon pre-germanidation implant into Ge on the thermal stability of NiGe films

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Institution:晶体材料研究所

Title of Paper:Effects of carbon pre-germanidation implant into Ge on the thermal stability of NiGe films

Journal:Microelectronic Engineering

First Author:刘宏

Document Code:lw-173047

Translation or Not:No

Date of Publication:2015-01

Release Time:2019-04-14

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