Title : Effects of carbon pre-germanidation implant into Ge on the thermal stability of NiGe films
Hits :
Affiliation of Author(s):晶体材料研究所
Title of Paper:Effects of carbon pre-germanidation implant into Ge on the thermal stability of NiGe films
Journal:Microelectronic Engineering
First Author:Liu Hong
Indexed by:Applied Research
Document Code:lw-173047
Translation or Not:no
Date of Publication:2015-01-09
The Last Update Time : ..