刘勇

个人信息Personal Information

教授 博士生导师 硕士生导师

性别:男

毕业院校:南京航空航天大学

学历:博士研究生毕业

学位:工学博士学位

在职信息:在职

所在单位:机电与信息工程学院

入职时间:2011-03-09

办公地点:知行北楼305室

联系方式:rzliuyong@163.com


电子邮箱:rzliuyong@163.com

扫描关注

论文成果

当前位置: 中文主页 >> 科学研究 >> 论文成果

Ultrasonic assisted electrochemical discharge milling of complex glass microstructure with high-quality

点击次数:

所属单位:Shandong University, Weihai

发表刊物:Journal of Manufacturing Processes

关键字:Electrochemical discharge millingUltrasonic vibrationGas film formationDischarge energyMachining quality

摘要:Introduction: With the rapid development of MEMS, the demand for non-conductive hard and brittle material microstructure is increasing. Electrochemical Discharge Machining (ECDM) is one of the most effective methods to machine non-conductive materials like glass and ceramics. However, in the milling process, the problem of discharge pits of different sizes and large thermal cracks caused by excessive discharge energy and heterogeneous energy distribution leads to low machining accuracy, poor stability and surface quality.Objectives: In order to solve the above dilemmas and improve the machining quality and stability, a newly developed micro Ultrasonic Assisted Electrochemical Discharge Milling (UAECDM) method is proposed in this paper.Methods: Firstly, a mathematical model is established to reveal the material erosion mechanism in the machining process. Secondly, the influence of ultrasonic vibration on gas film formation and discharge energy is analyzed by theory and simulation. Finally, the effects of ultrasonic amplitude and machining parameters on the quality of microchannels are experimentally studied and optimized by single factor optimization. The machining tech-nology of UAECDM is creatively proposed. Results: The experimental results show that adding ultrasonic assistance and using the optimized machining parameters can refine the film thickness, optimize the energy distribution and stabilize the current signal. With assistance of ultrasonic vibration and optimized parameters, a smooth micro channel with width of 118.9 mu m was fabricated, and its surface roughness was 0.23 mu m, which was 80.99 % declined from 1.21 mu m of ECDM. The successful fabrication of microchannel array, two-dimensional and three-dimensional complex glass micro-structures with surface roughness of about 0.2 mu m also proves the excellent machining ability of UAECDM.Conclusion: It is proved that UAECDM can effectively improve machining accuracy, stability and surface quality. UAECDM is a desirable method to fabricate micro-channel on glass and will have a very broad industrial application prospect in the future.

全部作者:Wang, Tianbo, Kan,

第一作者:Chen, Zhonghua

论文类型:Research Paper

通讯作者:Yong Liu

论文编号:10.1016/j.jmapro.2023.03.044

文献类型:Journal article

卷号:94

页面范围:94-106

ISSN号:1526-6125

是否译文:

发表时间:4507-02-01