Surface integrity analysis of Si3N4 under cryogenic assisted femtosecond laser ablation

Release time:2024-11-24|Hits:

Affiliation of Author(s):机械工程学院

Journal:Ceramics International

First Author:于锡潼

Document Code:1787758662056697858

Number of Words:5

Translation or Not:no

Date of Publication:2024-07-01