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Surface integrity analysis of Si3N4 under cryogenic assisted femtosecond laser ablation
Release Time:2024-11-24
  • Institution:
    机械工程学院
  • Journal:
    Ceramics International
  • First Author:
    于锡潼
  • Document Code:
    1787758662056697858
  • Number of Words:
    5
  • Translation or Not:
    No
  • Date of Publication:
    2024-07
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