低温等离子体辅助MOCVD技术制备AlInN薄膜材料的生长及掺杂特性研究
Release time:2019-04-18
Hits:
- Affiliation of Participant(s):
- 物理学院
- Leading Scientist:
- jifeng
- Supported by:
- 国家基金委
- Nature of Project:
- 纵向
- Project level:
- National
- Project Participants:
- jifeng,Fujian Zong,luancaina,Xijian Zhang
- Project Number:
- kyxm-14368
- Date of Project Approval:
- 2011-01-01
- Scheduled completion time:
- 2013-12-31
- Date of Project Completion:
- 2013-12-31
- Date of Project Initiation:
- 2011-01-01
- Project Approval Number:
- 51072101
- Pre One:Beta-氧化镓单晶薄膜的外延生长及性质研究
- Next One:单晶氧化锡外延薄膜的制备及性能研究