Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM
Release time:2019-10-25
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- Affiliation of Author(s):
- 微电子学院
- Journal:
- Journal of Electronic Materials
- All the Authors:
- xiaohongdi,maohongzhi,luancaina,Jianqiang Liu,Ma Jin
- First Author:
- xiaohongdi
- Indexed by:
- Unit Twenty Basic Research
- Document Code:
- DBE67F01DB544898847C76A91BEC549C
- Volume:
- 48
- Page Number:
- 3036
- Translation or Not:
- no
- Date of Publication:
- 2019-02-01