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Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM
Affiliation of Author(s):微电子学院
Journal:Journal of ELECTRONIC MATERIALS
All the Authors:maohongzhi,luancaina,Jianqiang Liu,Ma Jin,xiaohongdi
First Author:杨小坤
Indexed by:Applied Research
Document Code:9600585BF2564969BC16220CA429D8C2
Volume:48
Issue:5
Page Number:3036
Translation or Not:no
Date of Publication:2019-05-01