Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM
Release time:2020-03-20
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- Affiliation of Author(s):
- 微电子学院
- Journal:
- Journal of ELECTRONIC MATERIALS
- All the Authors:
- maohongzhi,luancaina,Jianqiang Liu,Ma Jin,xiaohongdi
- First Author:
- 杨小坤
- Indexed by:
- Applied Research
- Document Code:
- 9600585BF2564969BC16220CA429D8C2
- Volume:
- 48
- Issue:
- 5
- Page Number:
- 3036
- Translation or Not:
- no
- Date of Publication:
- 2019-05-01