Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM
Release Time:2020-03-20
Hits:
- Institution:
- 集成电路学院
- Title of Paper:
- Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM
- Journal:
- Journal of ELECTRONIC MATERIALS
- First Author:
- 杨小坤
- All the Authors:
- 肖洪地,马瑾,Jianqiang Liu,栾彩娜,毛宏志
- Document Code:
- 9600585BF2564969BC16220CA429D8C2
- Volume:
- 48
- Issue:
- 5
- Page Number:
- 3036
- Number of Words:
- 3
- Translation or Not:
- No
- Date of Publication:
- 2019-05
- Release Time:
- 2020-03-20