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Structural and electrical properties of epitaxial SnO2: Sb films deposited on 6 H-SiC by MOCVD

Release time:2021-09-30
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Affiliation of Author(s):
集成电路学院
Journal:
Journal of Materials Science: Materials in Electronics
First Author:
栾彩娜
Document Code:
062581828EBA4033A88622C46DF3939D
Volume:
32
Issue:
16
Page Number:
21798
Number of Words:
3000
Translation or Not:
no
Date of Publication:
2021-08-01