Effect of epitaxial growth rate on morphological, structural and optical properties of beta-Ga2O3 films prepared by MOCVD
Release time:2022-06-18
Hits:
- Affiliation of Author(s):
- 微电子学院
- Journal:
- Materials Research Bulletin
- First Author:
- 王迪
- Document Code:
- 4D4D953CCFCB46E68E85AE80D961AD64
- Volume:
- 149
- Number of Words:
- 5
- Translation or Not:
- no
- Date of Publication:
- 2022-05-01