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Effect of epitaxial growth rate on morphological, structural and optical properties of beta-Ga2O3 films prepared by MOCVD
Affiliation of Author(s):微电子学院
Journal:Materials Research Bulletin
First Author:王迪
Document Code:4D4D953CCFCB46E68E85AE80D961AD64
Volume:149
Number of Words:5
Translation or Not:no
Date of Publication:2022-05-01