Effect of epitaxial growth rate on morphological, structural and optical properties of beta-Ga2O3 films prepared by MOCVD
Release Time:2022-06-18
Hits:
- Institution:
- 集成电路学院
- Title of Paper:
- Effect of epitaxial growth rate on morphological, structural and optical properties of beta-Ga2O3 films prepared by MOCVD
- Journal:
- Materials Research Bulletin
- First Author:
- 王迪
- Document Code:
- 4D4D953CCFCB46E68E85AE80D961AD64
- Volume:
- 149
- Number of Words:
- 5
- Translation or Not:
- No
- Date of Publication:
- 2022-05
- Release Time:
- 2022-06-18