Heteroepitaxial growth of the δ-Ta2O5 films on a-Al2O3(0001)
Release time:2022-12-17
Hits:
- Affiliation of Author(s):
- 微电子学院
- Journal:
- Journal of Materials Science-Materials in Electronics
- First Author:
- 马瑾
- Document Code:
- 82B66AFBC45F46DE928D3AE918047B0B
- Issue:
- 33
- Number of Words:
- 4
- Translation or Not:
- no
- Date of Publication:
- 2022-01-18