Title : Preparation and properties of heteroepitaxial beta-Ga2O3 films on KTaO3 (100) substrates by MOCVD

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Affiliation of Author(s):微电子学院

Title of Paper:Preparation and properties of heteroepitaxial beta-Ga2O3 films on KTaO3 (100) substrates by MOCVD

Journal:MATERIALS CHARACTERIZATION Journal

First Author:王迪

Indexed by:Applied Research

Document Code:3B08BF7E953F4E09831216E84A5AC61A

Volume:165

Translation or Not:no

Date of Publication:2020-07-01