Paper Publications
Title of Award : Heteroepitaxial growth of the δ-Ta2O5 films on a-Al2O3(0001)
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Institution:集成电路学院
Title of Paper:Heteroepitaxial growth of the δ-Ta2O5 films on a-Al2O3(0001)
Journal:Journal of Materials Science-Materials in Electronics
First Author:马瑾
Document Code:82B66AFBC45F46DE928D3AE918047B0B
Issue:33
Number of Words:4
Translation or Not:No
Date of Publication:2022-01
Release Time:2022-12-17