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Simulations of Breakdown Voltage of Coplanar Electrodes Microplasma Devices

Release Time:2019-10-24
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Institution:
集成电路学院
Title of Paper:
Simulations of Breakdown Voltage of Coplanar Electrodes Microplasma Devices
Journal:
IEEE Transactions on plasma science
First Author:
Meng lingguo
All the Authors:
邢建平,Meng lingguo
Document Code:
lw-144784
Volume:
41
Issue:
1
Page Number:
12
Number of Words:
5
Translation or Not:
No
Date of Publication:
2013-01
Release Time:
2019-10-24