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SiC单晶衬底的超精密加工

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  • Affiliation of Participant(s):晶体材料研究所

  • Leading Scientist:huxiaobo

  • Supported by:教育部

  • Nature of Project:纵向

  • Project level:省、部委级

  • Project Participants:huxiaobo,pengyan,huxiaobo,xuxiangang,yuguangwei

  • Project Number:kyxm-30048

  • Project Approval Number:707039

  • Date of Project Approval:2008-01-01

  • Date of Project Initiation:2008-01-01

  • Scheduled completion time:2010-12-30

  • Date of Project Completion:2010-12-30

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