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碳化硅晶体生长非线性模拟与控制系统

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  • Affiliation of Participant(s):晶体材料研究所

  • Leading Scientist:pengyan

  • Supported by:山东省科学院—2014年山东省自主创新专项

  • Nature of Project:纵向

  • Project level:省、部委级

  • Project Participants:pengyan,pengyan,chenxiufang,huxiaobo

  • Project Number:kyxm-58724

  • Project Approval Number:2014ZZCX04215

  • Date of Project Approval:2014-01-01

  • Date of Project Initiation:2014-01-01

  • Scheduled completion time:2017-12-31

  • Date of Project Completion:2017-12-31

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