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具有GaN插入层的大功率碳化硅光导开关制备及其性能研究

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  • Affiliation of Participant(s):微电子学院

  • Leading Scientist:xuhuayong

  • Supported by:省科技厅

  • Nature of Project:纵向

  • Project level:省、部委级

  • Project Participants:xuhuayong,zuozhiyuan,pengyan,Zhang Heng

  • Project Number:kyxm-63543

  • Project Approval Number:ZR2016FB23

  • Date of Project Approval:2016-11-18

  • Date of Project Initiation:2016-11-01

  • Scheduled completion time:2018-11-30

  • Date of Project Completion:2018-11-30

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