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低缺陷高质量n型SiC衬底材料技术研发

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  • Affiliation of Participant(s):晶体材料研究所

  • Leading Scientist:pengyan

  • Type of Project:应用研究

  • Nature of Project:横向

  • Project Participants:pengyan

  • Project Number:9749F786F0937393E053BE07C2CAFFDA

  • Date of Project Approval:2019-09-01

  • Date of Project Initiation:2019-09-01

  • Scheduled completion time:2020-10-01

  • Date of Project Completion:2020-10-01

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