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    6英寸半绝缘4H-SiC 衬底材料的开发技术项目

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    • Project Name:6英寸半绝缘4H-SiC 衬底材料的开发技术项目

    • Institution:新一代半导体材料研究院

    • Leading Scientist:彭燕

    • Nature of Project:横向

    • Project Participants:徐现刚,谢雪健,肖龙飞

    • Project Number:A7396A0B419903D6E053BE07C2CA1BEB

    • Date of Project Approval:2020-03-16

    • Scheduled Completion Time:2021-03-16

    • Date of Project Completion:2021-03-16

    • Date of Project Initiation:2020-03-16

    • Release Time:2020-06-09
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