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SiC单晶生长和加工技术产业化研究-2

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  • Affiliation of Participant(s):新一代半导体材料研究院

  • Leading Scientist:彭燕

  • Nature of Project:横向

  • Project Number:EFB08D4EDA5146818DC934356D55DA5E

  • Date of Project Approval:2011-12-21

  • Date of Project Initiation:2011-12-21

  • Scheduled completion time:2015-12-31

  • Date of Project Completion:2015-12-31

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