中文
Home > Scientific Research > Paper Publications

用于MPCVD金刚石薄膜生长的高表面质量HTHP金刚石的制备

Hits:

  • Affiliation of Author(s):新一代半导体材料研究院

  • Journal:《材料导报》

  • Key Words:激光切割;化学机械抛光;HTHP金刚石;MPCVD金刚石薄膜

  • First Author:段鹏

  • Document Code:2EAC0101F3DD4C9DA8DA2E5343BDDF59

  • Issue:4

  • Number of Words:3000

  • Translation or Not:no

  • Date of Publication:2021-02-25

  • Date of Publication:2021-02-25
Copyright All Rights Reserved Shandong University Address: No. 27 Shanda South Road, Jinan City, Shandong Province, China: 250100
Information desk: (86) - 0531-88395114
On Duty Telephone: (86) - 0531-88364731 Construction and Maintenance: Information Work Office of Shandong University		 Click:
  MOBILE Version

The Last Update Time:..