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SiC 单晶生长初期表面台阶及微管特性

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  • Affiliation of Author(s):新一代半导体材料研究院

  • Journal:硅酸盐学报

  • First Author:仲光磊

  • Document Code:C9837A4B207D4FA39ED4D2F1AAB0891E

  • Issue:8

  • Number of Words:3000

  • Translation or Not:no

  • Date of Publication:2022-08-01

  • Date of Publication:2022-08-01
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