荣学文
Title:Professor of Application
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Patents
Title of Award : 一种半导体加工晶圆超声悬浮驱动装置
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Title:一种半导体加工晶圆超声悬浮驱动装置
Institution:控制科学与工程学院
Type of Patent:Invent
Application Number:202210652114.9
Number of Inventors:5
Service Invention or Not:No
Application Date:2022-06-10
Publication Date:2024-05-03
Authorization Date:2024-05-03
Release Time:2023-09-07