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Title:基于Fano共振耦合谐振腔太赫兹波导传感器件及其制备方法
Institution:集成电路学院
Type of Patent:Invent
Application Number:202110523291.2
Number of Inventors:1
Service Invention or Not:No
Application Date:2021-05-13
Publication Date:2022-04-12
Authorization Date:2022-04-12
Release Time:2021-06-09