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Title:一种基于腔模共振的太赫兹传感器及其制备方法
Institution:集成电路学院
Type of Patent:Invent
Application Number:201911253341.9
Number of Inventors:1
Service Invention or Not:No
Application Date:2019-12-09
Publication Date:2023-03-14
Authorization Date:2023-03-14
Release Time:2023-04-01