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一种由磁控溅射制备纳米多孔铜薄膜材料的方法

Release Time:2019-04-15 Hits:

Title:一种由磁控溅射制备纳米多孔铜薄膜材料的方法
Institution:材料科学与工程学院
Type of Patent:Invent
Application Number:201610071243.3
Number of Inventors:1
Service Invention or Not:No
Application Date:2016-02-01
Publication Date:2018-03-27
Authorization Date:2018-03-27
Release Time:2019-04-15