Institution:微电子学院
Title of Paper:A Novel Thermally Evaporated Etching Mask for Low-Damage Dry Etching
Journal:IEEE Transactions on Nanotechnology
First Author:王汉斌
All the Authors:王一鸣,王卿璞,辛倩,韩琳,Song A M
Document Code:E56E2B7ED1104702BAEB516FA27F194D
Volume: 16
Issue:2
Page Number:290
Translation or Not:No
Date of Publication:2017-03
Release Time:2019-06-12
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Alma Mater : 山东大学
Education Level : Postgraduate (Doctoral)
Degree : Doctor
Status : Employed
School/Department : 集成电路学院
Faculty/School : School of Integrated Circuits,Shandong University
Business Address : 软件园校区
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