Institution:集成电路学院
Title of Paper:Electron transport mechanism through ultrathin Al2O3 films grown at low temperatures using atomic–layer deposition
Journal:SEMICONDUCTOR SCIENCE AND TECHNOLOGY
First Author:马鹏飞
All the Authors:辛倩,Li Yuxiang,Song A M
Document Code:88E26D2A696048E9B15A76399673DAD1
Volume:34
Issue:10
Page Number:105004
Translation or Not:No
Date of Publication:2019-07
Release Time:2019-10-25
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Alma Mater : 山东大学
Education Level : Postgraduate (Doctoral)
Degree : Doctor
Status : Employed
School/Department : 集成电路学院
Faculty/School : School of Integrated Circuits,Shandong University
Business Address : 软件园校区
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