Affiliation of Author(s): : 微电子学院
Title of Paper: : Electron transport mechanism through ultrathin Al2O3 films grown at low temperatures using atomic–layer deposition
Journal: : SEMICONDUCTOR SCIENCE AND TECHNOLOGY
All the Authors: : xinqian,Li Yuxiang,Song A M
First Author: : 马鹏飞
Indexed by: : Applied Research
Document Code: : 88E26D2A696048E9B15A76399673DAD1
Volume: : 34
Issue: : 10
Page Number: : 105004
Translation or Not: : no
Date of Publication: : 2019-07-11
Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Gender : Male
Alma Mater : 山东大学
Education Level : Postgraduate (Doctoral)
Degree : Doctor
Status : Employed
School/Department : 微电子学院
Business Address : 软件园校区
Email : songam@sdu.edu.cn
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