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宋锐

Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates


Gender:Male
Education Level:With Certificate of Graduation for Doctorate Study
Degree:Doctoral Degree in Engineering
Status:Employed
School/Department:控制科学与工程学院
Date of Employment:2003-09-29
College: School of Control Science and Engineering
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Current position: Home >> Scientific Research >> Patents
一种半导体加工晶圆超声悬浮驱动装置

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Title:一种半导体加工晶圆超声悬浮驱动装置

Institution:控制科学与工程学院

Type of Patent:Invent

Application Number:202210652114.9

Number of Inventors:5

Service Invention or Not:No

Application Date:2022-06-10

Publication Date:2024-05-03

Authorization Date:2024-05-03

Release Time:2023-09-07

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