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中文
宋锐

Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates


Gender:Male
Education Level:With Certificate of Graduation for Doctorate Study
Degree:Doctoral Degree in Engineering
Status:Employed
School/Department:控制科学与工程学院
Date of Employment:2003-09-29
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Click:Times

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Current position: Home >> Scientific Research >> Patents

一种半导体加工晶圆超声悬浮驱动装置

Hits: Praise

Affilication of Author(s):控制科学与工程学院

Type of Patent:发明

Application Number:JP202213111.5

Number of Inventors:5

Service Invention or Not:no

Application Date:2022-08-19

Publication Date:2023-05-01

Authorization Date:2023-05-01

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