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高温压电晶体制备及 MEMS 压力传感器研制
Release Time:2024-04-17
  • Institution:
    晶体材料研究院（晶体材料全国重点实验室）
  • Leading Scientist:
    于法鹏
  • Supported by:
    2022 National Key R&D Program for Technology-based Small and Medium-sized Enterprises Project -- Qingdao Xinsheng Micro-Nano Electronics Technology Co., Ltd.
  • Nature of Project:
    纵向
  • Project Level:
    National
  • Project Number:
    0F0B34054B0A7FFBE063BE07C2CA82D8
  • Project Approval Number:
    2023YFB3210700
  • Date of Project Approval:
    2023-12-01
  • Scheduled Completion Time:
    2026-11-30
  • Date of Project Completion:
    2026-11-30
  • Date of Project Initiation:
    2023-12-01
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