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Hot-zone design and optimization of resistive heater for SiC single crystal growth

Release time:2024-05-16|Hits:

Affiliation of Author(s):新一代半导体材料研究院

Journal:JOURNAL OF MATERIALS SCIENCE Journal

First Author:王兴龙

Document Code:E30905E21DD84A7D8F8435329EB0643D

Issue:19

Number of Words:3000

Translation or Not:no

Date of Publication:2024-05-14

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