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Hot-zone design and optimization of resistive heater for SiC single crystal growth
Release Time:2024-05-16
  • Institution:
    新一代半导体材料研究院
  • Journal:
    JOURNAL OF MATERIALS SCIENCE Journal
  • First Author:
    王兴龙
  • Document Code:
    E30905E21DD84A7D8F8435329EB0643D
  • Issue:
    19
  • Number of Words:
    3000
  • Translation or Not:
    No
  • Date of Publication:
    2024-05
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