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集成电路专业知识体系研发项目
  • Affiliation of Participant(s):
    微电子学院
  • Leading Scientist:
    wangqingpu
  • Type of Project:
    研究与发展成果应用
  • Nature of Project:
    横向
  • Project Participants:
    wangqingpu,suwei
  • Project Number:
    9821D55D586A43BFE053BE07C2CA4C86
  • Date of Project Approval:
    2019-11-20
  • Scheduled completion time:
    2020-12-31
  • Date of Project Completion:
    2020-12-31
  • Date of Project Initiation:
    2019-11-20

Pre One:LPCVD工艺中SIPOS玻璃钝化芯片特性研究

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