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LPCVD工艺中SIPOS玻璃钝化芯片特性研究
  • Project Name:
    LPCVD工艺中SIPOS玻璃钝化芯片特性研究
  • Institution:
    集成电路学院
  • Leading Scientist:
    王卿璞
  • Nature of Project:
    横向
  • Project Participants:
    王卿璞,苏伟,徐明升
  • Project Number:
    9E84877886D701CBE053BE07C2CA2B19
  • Date of Project Approval:
    2019-12-16
  • Scheduled Completion Time:
    2022-12-16
  • Date of Project Completion:
    2022-12-16
  • Date of Project Initiation:
    2019-12-16
  • Release Time:
    2020-03-06
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