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LPCVD工艺中SIPOS玻璃钝化芯片特性研究
  • Affiliation of Participant(s):
    微电子学院
  • Leading Scientist:
    wangqingpu
  • Type of Project:
    其他科技服务
  • Nature of Project:
    横向
  • Project Participants:
    wangqingpu,suwei,xumingsheng
  • Project Number:
    9E84877886D701CBE053BE07C2CA2B19
  • Date of Project Approval:
    2019-12-16
  • Scheduled completion time:
    2022-12-16
  • Date of Project Completion:
    2022-12-16
  • Date of Project Initiation:
    2019-12-16

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