Institution:信息科学与工程学院
Title of Paper:Design and evaluation of a highly robust MEMS Pirani vacuum gauge based on porous silicon thermal insulation layer
Journal:2022 IEEE International Flexible Electronics Technology Conference (IFETC)
First Author:张子超
Document Code:9407D58A00D443D5BD50B937EC5D983A
Number of Words:1
Translation or Not:No
Date of Publication:2022-08
Release Time:2023-10-08
Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Gender : Male
Alma Mater : 北京邮电大学
Education Level : Postgraduate (Doctoral)
Degree : Doctoral Degree in Engineering
Status : Employed
School/Department : 信息科学与工程学院
Date of Employment : 2018-07-25
Faculty/School : School of Information Science and Engineering
Discipline:Other Majors of Electronics Science and Technology
Physical Electronics
Business Address : 山东大学青岛校区N5楼223室
中国山东省青岛市即墨滨海路72号，266237
email :
Telephone :
Honor
齐鲁青年学者 2018
泰山学者 2018
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