Affiliation of Author(s): : 信息科学与工程学院
Title of Paper: : Design and evaluation of a highly robust MEMS Pirani vacuum gauge based on porous silicon thermal insulation layer
First Author: : 张子超
Document Code: : 9407D58A00D443D5BD50B937EC5D983A
Number of Words: : 1
Translation or Not: : no
Date of Publication: : 2022-08-21
Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Gender : Male
Alma Mater : 北京邮电大学
Education Level : Postgraduate (Doctoral)
Degree : Doctoral Degree in Engineering
Status : Employed
School/Department : 信息科学与工程学院
Date of Employment : 2018-07-25
Discipline:Other Majors of Electronics Science and Technology
Physical Electronics
Business Address : 山东大学青岛校区N5楼223室
中国山东省青岛市即墨滨海路72号，266237
Honors and Titles:
齐鲁青年学者 2018
泰山学者 2018
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