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Modeling and simulation of phase transformation and crack formation during scribing of mono-crystalline silicon

Release Time:2021-05-28| Hits:

Institution:机械工程学院

Title of Paper:Modeling and simulation of phase transformation and crack formation during scribing of mono-crystalline silicon

Journal:International Journal of Mechanical Sciences

First Author:王兵

Document Code:6BCE4BF828864ED4AACE5ECCF1207D07

Issue:175

Number of Words:7000

Translation or Not:No

Date of Publication:2020-06

Release Time:2021-05-28

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