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Effect of speed on material removal behavior in scribing of monocrystalline silicon

Release Time:2021-05-28| Hits:

Institution:机械工程学院

Title of Paper:Effect of speed on material removal behavior in scribing of monocrystalline silicon

Journal:PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISIONENGINEERING AND NANOTECHNOLOGY

First Author:王兵

Document Code:F63C8749907C4AB1A5D532252419FDB9

Issue:66

Number of Words:5000

Translation or Not:No

Date of Publication:2020-11

Release Time:2021-05-28

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Effect of scratching speed on phase transformations in high-speed scratching of monocrystalline silicon
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Modeling and simulation of phase transformation and crack formation during scribing of mono-crystalline silicon

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