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Effect of speed on material removal behavior in scribing of monocrystalline silicon
  • Affiliation of Author(s):
    机械工程学院
  • Journal:
    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISIONENGINEERING AND NANOTECHNOLOGY
  • First Author:
    王兵
  • Document Code:
    F63C8749907C4AB1A5D532252419FDB9
  • Issue:
    66
  • Number of Words:
    5000
  • Translation or Not:
    no
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