Numerical Investigation for the Resin Filling Behavior during Ultraviolet Nanoimprint Lithography of Subwavelength Moth-Eye Nanostructure
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Institution:机械工程学院
Title of Paper:Numerical Investigation for the Resin Filling Behavior during Ultraviolet Nanoimprint Lithography of Subwavelength Moth-Eye Nanostructure
Journal:COATINGS
First Author:崔远驰
Document Code:E0737E3F62EF4AC388734E15EC885AF6
Volume:11
Issue:7
Number of Words:5
Translation or Not:No
Date of Publication:2021-07
Release Time:2021-10-06