一种制备均匀薄膜的复合涂布装置及方法
Hits:
Title:一种制备均匀薄膜的复合涂布装置及方法
Institution:机械工程学院
Type of Patent:Invent
Application Number:202011382674.4
Number of Inventors:5
Service Invention or Not:No
Application Date:2020-12-01
Publication Date:2022-04-12
Authorization Date:2022-04-12
Release Time:2022-06-09