wangqingpu

Doctor

With Certificate of Graduation for Doctorate Study

山东大学

Personal Information:

Gender:Male
Date of Employment:1987-07-01
Business Address:高新区软件校区微电子学院3B202室
E-Mail:wangqingpu@sdu.edu.cn

VIEW MORE
Home > Scientific Research > Paper Publications

High-dose ion-implanted photoresist stripping in environmentally benign supercritical CO2 nonfluorous surfactant microemulsions

Date of Publication:2012-08-01 Hits:

Affiliation of Author(s):物理学院
Journal:Microelectron. Eng.
All the Authors:wangqingpu
First Author:Li Yuxiang
Indexed by:Applied Research
Document Code:lw-136618
Volume:96
Page Number:1
Translation or Not:no
Date of Publication:2012-08-01

Pre One:The effects of supercritical CO2 formulations on the removal of high-dose ion-implanted photoresists

Next One:Effects of annealing on the optical and electronic properties of poly(vinylidene fluoride-trifluoroethylene) copolymer thin films

Copyright All Rights Reserved Shandong University Address: No. 27 Shanda South Road, Jinan City, Shandong Province, China: 250100
Information desk: (86) - 0531-88395114
On Duty Telephone: (86) - 0531-88364731 Construction and Maintenance: Information Work Office of Shandong University

Click:  | The Last Update Time:..  | Login | SDU