wangqingpu

Doctor

With Certificate of Graduation for Doctorate Study

山东大学

Personal Information:

Gender:Male
Date of Employment:1987-07-01
Business Address:高新区软件校区微电子学院3B202室
E-Mail:wangqingpu@sdu.edu.cn

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The effects of supercritical CO2 formulations on the removal of high-dose ion-implanted photoresists

Date of Publication:2013-04-06 Hits:

Affiliation of Author(s):物理学院
Journal:Microelectron. Eng.
All the Authors:wangqingpu
First Author:Li Yuxiang
Indexed by:Applied Research
Document Code:lw-147346
Volume:108
Page Number:50
Translation or Not:no
Date of Publication:2013-04-06

Pre One:The Stripping Behavior of High-Dose Ion-Implanted Photoresists in Supercritical CO2 Formulations

Next One:High-dose ion-implanted photoresist stripping in environmentally benign supercritical CO2 nonfluorous surfactant microemulsions

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