Affiliation of Author(s):微电子学院
Journal:Semiconductor Science and Technology
All the Authors:wangqingpu,Song A M,xinqian
First Author:屈云秀
Indexed by:Unit Twenty Basic Research
Document Code:306C1BC020D64616816E1C71B9BB943C
Volume:33
Issue:7
Translation or Not:no
Date of Publication:2018-07-01