wangqingpu

Doctor

With Certificate of Graduation for Doctorate Study

山东大学

Recommended MA Supervisor

Personal Information

Gender:Male
Date of Employment:1987-07-01
Business Address:高新区软件校区微电子学院3B202室

VIEW MORE
Home > Scientific Research > Paper Publications

The Stripping Behavior of High-Dose Ion-Implanted Photoresists in Supercritical CO2 Formulations

Release Time:2019-10-30 Hits:

Institution:集成电路学院
Journal:ECS J. Solid State Sci. & Tech.
First Author:李波
All the Authors:王卿璞,Li Yuxiang
Document Code:lw-147347
Volume:2
Issue:4
Page Number:73
Number of Words:5
Translation or Not:No
Date of Publication:2013-01

Prev One:High-dose ion-implanted photoresist stripping in environmentally benign supercritical CO2 nonfluorous surfactant microemulsions

Next One:Influence of excitation light wavelength on the photoluminescence properties for ZnO films prepared by magnetron sputtering

Copyright All Rights Reserved Shandong University Address: No. 27 Shanda South Road, Jinan City, Shandong Province, China: 250100
Information desk: (86) - 0531-88395114
On Duty Telephone: (86) - 0531-88364731 Construction and Maintenance: Information Work Office of Shandong University

Click:  | The Last Update Time:..  | Login | SDU