wangqingpu

Doctor

With Certificate of Graduation for Doctorate Study

山东大学

Personal Information:

Gender:Male
Date of Employment:1987-07-01
Business Address:高新区软件校区微电子学院3B202室
E-Mail:wangqingpu@sdu.edu.cn

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High-dose ion-implanted photoresist stripping in environmentally benign supercritical CO2 nonfluorous surfactant microemulsions

Date of Publication:2012-03-20 Hits:

Affiliation of Author(s):集成电路学院
Journal:Microelectron. Eng.
All the Authors:wangqingpu,Li Yuxiang
First Author:韩婷婷
Document Code:lw-136618
Volume:96
Page Number:1
Number of Words:3800
Translation or Not:no
Date of Publication:2012-03-20

Pre One:Effects of annealing on the optical and electronic properties of poly(vinylidene fluoride-trifluoroethylene) copolymer thin films

Next One:The Stripping Behavior of High-Dose Ion-Implanted Photoresists in Supercritical CO2 Formulations

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