TDDB characteristic and breakdown mechanism of ultra-thin SiO2/HfO2 bilayer gate dielectrics
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所属单位:信息科学与工程学院
发表刊物:Journal of Semiconductors
第一作者:王卿璞
论文类型:应用研究
论文编号:lw-153554
卷号:35
期号:6
页面范围:064003-1
是否译文:否
发表时间:2014-06-01
发表时间:2014-06-01
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