王守志
Professor
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Patents
一种蓝宝石模板上GaN单晶衬底高温激光剥离装置及剥离方法
  • Affilication of Author(s):
    新一代半导体材料研究院
  • Type of Patent:
    发明
  • Application Number:
    202110855731.4
  • Number of Inventors:
    10
  • Service Invention or Not:
    no
  • Application Date:
    2021-07-28
  • Publication Date:
    2024-03-22
  • Authorization Date:
    2024-03-22

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