Wang Tianyu 山东大学主页平台管理系统--Home

王天宇

Professor

Visit:

Name (Pinyin):

Wang Tianyu
E-Mail:

tywang@sdu.edu.cn
Date of Employment:

2023-12-25
School/Department:

School of Integrated Circuits, Shandong University
Education Level:

Postgraduate (Postdoctoral)
Business Address:

Shandong University Software Park Campus, No. 1500 Shunhua Road, High tech Zone, Jinan City, Shandong Province
Gender:

Male
Contact Information:

tywang@sdu.edu.cn
Degree:

Doctoral Degree in Science
Title:

Professor
Status:

Employed
Other Post:

国家博新人才，上海市高层次人才，泰山学者青年专家，山东省优青，齐鲁青年学者
Alma Mater:

Fudan University
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates

Discipline:

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铪基铁电存储器（面向后摩尔先进纳米节点器件与三维集成技术）

新型铁电存储器件产业化发展面临的重要瓶颈是材料及制备工艺与集成电路CMOS工艺不兼容，限制了存储器领域的发展和应用。HfO2薄膜目前广泛应用于 CMOS 晶体管中栅介质材料，厚度可微缩至10 nm以下。面向后摩尔先进纳米节点器件需求，研究纳米存储器的尺寸微缩、可靠性与三维集成技术，在国内集成电路龙头企业流片并开展产业化合作。

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