Affiliation of Author(s): : 控制科学与工程学院
Title of Paper: : Dynamic modeling and analysis of wafers in near-field acoustic levitation
First Author: : 王立鹏
Document Code: : 1823289252571111425
Page Number: : 1023-1028
Number of Words: : 3
Translation or Not: : no
Date of Publication: : 2024-01-01
Professor
Gender : Male
Alma Mater : 东京工业大学
Education Level : With Certificate of Graduation for Doctorate Study
Degree : Doctoral Degree in Engineering
School/Department : 控制科学与工程学院
Date of Employment : 2021-01-07
The Last Update Time : ..
