Affiliation of Author(s): : 控制科学与工程学院
Title of Paper: : Development of a Compact and Contactless Stage Capable of Levitating\Rotating Wafer Functioning as an Ultrasonically Virtual Hand
Journal: : IEEE Transactions on Industrial Electronics
First Author: : Wang, Lipeng
Document Code: : 1777985836651143170
Page Number: : 1-10
Number of Words: : 6
Translation or Not: : no
Date of Publication: : 2024-03-18
Professor
Gender : Male
Alma Mater : 东京工业大学
Education Level : With Certificate of Graduation for Doctorate Study
Degree : Doctoral Degree in Engineering
School/Department : 控制科学与工程学院
Date of Employment : 2021-01-07
The Last Update Time : ..
