Title: : 一种半导体加工晶圆超声悬浮驱动装置
Affilication of Author(s): : 控制科学与工程学院
Type of Patent: : 发明
Application Number: : JP202213111.5
Number of Inventors: : 5
Service Invention or Not: : no
Application Date: : 2022-08-19
Publication Date: : 2023-05-01
Authorization Date: : 2023-05-01
Professor
Gender : Male
Alma Mater : 东京工业大学
Education Level : With Certificate of Graduation for Doctorate Study
Degree : Doctoral Degree in Engineering
School/Department : 控制科学与工程学院
Date of Employment : 2021-01-09
The Last Update Time : ..
