Project Name:面向半导体缺陷检测的深紫外晶体及激光装备研发（子课题3）
Institution:晶体材料研究院（晶体材料全国重点实验室）
Leading Scientist:武奎
Nature of Project:纵向
Project Number:27E1E8F76A6F7162E063BE07C2CACFD4
Project Approval Number:2024ZLGX02-4
Date of Project Approval:2025-01-01
Scheduled Completion Time:2027-12-31
Date of Project Completion:2027-12-31
Date of Project Initiation:2025-01-01
Release Time:2024-11-29