Synthesis and characterization of single-crystalline delta-Ta2O5 epitaxial films on Y-stabilized ZrO2 (111) substrates

Release time:2021-05-28|Hits:

Affiliation of Author(s):集成电路学院

Journal:Ceramics International

First Author:乐永

Document Code:6116E1F3B7E64F9D9EA9BB812731DEF9

Volume:47

Issue:4

Page Number:5510

Number of Words:4600

Translation or Not:no

Date of Publication:2021-02-15